Growth and fabrication of semi-polar InGaN/GaN multi-quantum well light-emitting diodes on microstructured Si (001) substrates |
Cross-sectional analysis of the GaN-based microstripes in the Si grooves. (a) Bright-field TEM image of the entire stripe revealing dislocations and interface. (b) Selective area electron diffraction pattern (SAED) of the GaN area. (c) STEM of the QW portion. |