Design of broad angular phase retarders for the complete polarization analysis of extreme ultraviolet radiation
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Lin Cheng-You
a)
, Chen Shu-Jing
b)
, Chen Zhao-Yang
a)
, Ding Ying-Chun
a)
The thickness distributions of the optimized Mo/Si multilayers in (a) 30°, (b) 60°, and (c) 90° phase retarders showed in Fig. 3 .