Design of broad angular phase retarders for the complete polarization analysis of extreme ultraviolet radiation*
Lin Cheng-Youa), Chen Shu-Jingb), Chen Zhao-Yanga), Ding Ying-Chuna)
       
The thickness distributions of the optimized Mo/Si multilayers in (a) 30°, (b) 60°, and (c) 90° phase retarders showed in Fig.  3 .