Design of broad angular phase retarders for the complete polarization analysis of extreme ultraviolet radiation |
(a) Phase retardation Δ ϕ and (b) s- and p-component transmissions T s and T p of broad angular 30°, 60°, and 90° phase retarders with bandwidth Δ θ = 12° designed with Mo/Si transmission multilayers of N = 20,35,50 respectively. |