Design of broad angular phase retarders for the complete polarization analysis of extreme ultraviolet radiation |
(a) Phase retardation Δ ϕ , (b) s- and p-component transmissions T s and T p, and (c) transmission ratio T s/ T p of broad angular 90° phase retarders with angular bandwidth Δ θ = 4° designed with Mo/Si transmission multilayers of N = 30, 40, 50 respectively. |