Design of broad angular phase retarders for the complete polarization analysis of extreme ultraviolet radiation*
Lin Cheng-Youa), Chen Shu-Jingb), Chen Zhao-Yanga), Ding Ying-Chuna)
       
The MFs of the optimized Mo/Si multilayers with bilayer number N changing from 5 to 50. The desired phase retardations Δ ϕ 0 of the optimized Mo/Si multilayers are (a) 30°, (b) 60°, and (c) 90°.