Trap states induced by reactive ion etching in AlGaN/GaN high-electron-mobility transistors
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Luo Jun
a)
, Zhao Sheng-Lei
a)
, Mi Min-Han
a)
, Hou Bin
b)
, Yang Xiao-Lei
b)
, Zhang Jin-Cheng
a)
, Ma Xiao-Hua
a),
b)
, Hao Yue
a)
(a) Trap state time constant as a function of gate voltage. (b) Trap state density as a function of their energy levels.