Trap states induced by reactive ion etching in AlGaN/GaN high-electron-mobility transistors*
Luo Juna), Zhao Sheng-Leia), Mi Min-Hana), Hou Binb), Yang Xiao-Leib), Zhang Jin-Chenga), Ma Xiao-Huaa),b), Hao Yuea)
       
(a) Trap state time constant as a function of gate voltage. (b) Trap state density as a function of their energy levels.