Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface*
Han Chaoa), Zhang Yu-Minga), Song Qing-Wena),b), Tang Xiao-Yana), Zhang Yi-Mena), Guo Huia), Wang Yue-Hua)
       
Surface morphology characterization of the as-grown epilayer: (a) NDIC image and (b) AFM scan.