Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface
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Han Chao
a)
, Zhang Yu-Ming
a)
, Song Qing-Wen
a),
b)
, Tang Xiao-Yan
a)
, Zhang Yi-Men
a)
, Guo Hui
a)
, Wang Yue-Hu
a)
Surface morphology characterization of the as-grown epilayer: (a) NDIC image and (b) AFM scan.