Relationship between bias voltage and microstructure as well as properties of CrAlYN films<xref ref-type="fn" rid="cpb150076fn1">*</xref>

Relationship between bias voltage and microstructure as well as properties of CrAlYN films*

Fu Ying-Ying^a),^b), Li Hong-Xuan^a), Ji Li^a), Liu Xiao-Hong^a), Liu Liu^c), Zhou Hui-Di^a), Chen Jian-Min^a)

Typical FESEM cross-sectional images for as-deposited CrAlYN film at -100 V (a), for film after annealing at 1000 °C for 2 h (b).