Relationship between bias voltage and microstructure as well as properties of CrAlYN films<xref ref-type="fn" rid="cpb150076fn1">*</xref>

Relationship between bias voltage and microstructure as well as properties of CrAlYN films*

Fu Ying-Ying^a),^b), Li Hong-Xuan^a), Ji Li^a), Liu Xiao-Hong^a), Liu Liu^c), Zhou Hui-Di^a), Chen Jian-Min^a)

Hardness for the CrAlYN films deposited at different bias voltages after annealing at 1000 °C for 2 h (a), and for film deposited at 100 V after annealing from 800 to 1100 °C (b).