Relationship between bias voltage and microstructure as well as properties of CrAlYN films*
Fu Ying-Yinga),b), Li Hong-Xuana), Ji Lia), Liu Xiao-Honga), Liu Liuc), Zhou Hui-Dia), Chen Jian-Mina)
       
XRD patterns for the CrAlYN films deposited at different bias voltages after annealing at 1000 °C for 2 h (a), and for film deposited at −100 V after annealing from 800 to 1100 °C (b).