Relationship between bias voltage and microstructure as well as properties of CrAlYN films<xref ref-type="fn" rid="cpb150076fn1">*</xref>

Relationship between bias voltage and microstructure as well as properties of CrAlYN films*

Fu Ying-Ying^a),^b), Li Hong-Xuan^a), Ji Li^a), Liu Xiao-Hong^a), Liu Liu^c), Zhou Hui-Di^a), Chen Jian-Min^a)

Hardness and residual stress (a), and H / E as well as H ³/ E ² (b) of the CrAlYN films deposited under different bias voltages.