Relationship between bias voltage and microstructure as well as properties of CrAlYN films<xref ref-type="fn" rid="cpb150076fn1">*</xref>

Relationship between bias voltage and microstructure as well as properties of CrAlYN films*

Fu Ying-Ying^a),^b), Li Hong-Xuan^a), Ji Li^a), Liu Xiao-Hong^a), Liu Liu^c), Zhou Hui-Di^a), Chen Jian-Min^a)

Typical FESEM cross-sectional and surface morphologies of the CrAlYN films deposited under different bias voltages (a₁, a₂) −75 V, (b₁, b₂) −100 V, (c₁, c₂) −125 V, (d₁, d₂) −150 V, and (e₁, e₂) −175 V.