Relationship between bias voltage and microstructure as well as properties of CrAlYN films<xref ref-type="fn" rid="cpb150076fn1">*</xref>

Relationship between bias voltage and microstructure as well as properties of CrAlYN films*

Fu Ying-Ying^a),^b), Li Hong-Xuan^a), Ji Li^a), Liu Xiao-Hong^a), Liu Liu^c), Zhou Hui-Di^a), Chen Jian-Min^a)

XRD patterns (a) and grain size as well as lattice parameters (b) of CrAlYN films deposited under different bias voltages.