Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model<xref ref-type="fn" rid="cpb151036fn1">*</xref>

Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model*

Xu Hui-Jing, Shu-Xia Zhao, Gao Fei, Zhang Yu-Ru, Li Xue-Chun, Wang You-Nian

Plasma transferred resistance (a) and inductance (b) of inductive discharge component versus the matching capacitance C ₁ at 20 mTorr.