Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model<xref ref-type="fn" rid="cpb151036fn1">*</xref>

Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model*

Xu Hui-Jing, Shu-Xia Zhao, Gao Fei, Zhang Yu-Ru, Li Xue-Chun, Wang You-Nian

Plasma transferred resistance ( R _p) (a) and inductance L _p (b) of the inductive discharge component versus the matching capacitance C ₁ at 100 mTorr.