Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model
*
Xu Hui-Jing, Shu-Xia Zhao
, Gao Fei, Zhang Yu-Ru, Li Xue-Chun, Wang You-Nian
Electron temperature T
e
versus the matching capacitance C
1
at (a) low pressure of 20 mTorr and (b) high pressure of 100 mTorr.