Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model*
Xu Hui-Jing, Shu-Xia Zhao, Gao Fei, Zhang Yu-Ru, Li Xue-Chun, Wang You-Nian
       
Electron density n e versus the matching capacitance C 1 at (a) low pressure of 20 mTorr and (b) high pressure of 100 mTorr.