Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model |
Flowchart of the used fluid model. Here, n e is the electron density, ν en is the collision frequency of electrons with neutrals, I coil is the coil current, V coil is the voltage drop across the coil, and E r , E z , and E θ are the radial, axial, and angular direction electric fields, respectively. |