Electrical properties of zinc-oxide-based thin-film transistors using strontium-oxide-doped semiconductors

Wu Shao-Hang^a),^b), Zhang Nan^a), Hu Yong-Sheng^a), Chen Hong^c), Jiang Da-Peng^a), Liu Xing-Yuan†^a)

(a) XRD pattern of SrZnO target. (b) SEM image of SrZnO target. (c) SEM image of ZnO target. (d) Energy dispersive x-ray spectrum of SrZnO target. (e) Energy dispersive x-ray spectrum of SrZnO film.