Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiO<sub><bold><em> x</em></bold></sub>:H film

Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiO_x:H film

Zhao Wei^a),^b), Du Lin-Yuan^a), Jiang Zhao-Yi^a), Yin Chen-Chen^a), Yu Wei†^a), Fu Guang-Sheng^a)

Variation of deposition rate with hydrogen dilution ratio R on substrate.