Fermi level pinning effects at gate–dielectric interfaces influenced by interface state densities |
Effective work functions of ploycrystalline silicon gate, metal gate, and metal silicide gate on various dielectric layers versus the relative permittivity of dielectric with D m = D Si ∼ 1023/eV·cm3 and D dm = D dSi ∼ 1021/eV·cm3. |