Effect of the annealing temperature on the long-term thermal stability of Pt/Si/Ta/Ti/4H–SiC contacts
Cheng Yue, Zhao Gao-Jie, Liu Yi-Hong, Sun Yu-Jun, Wang Tao, Chen Zhi-Zhan†
       
Cross-sectional TEM micrographs of the Si/Ta/Ti/4H–SiC contact. (a) 3R1000, (b) 3R1000-24, (c) 3R1100.