Effect of the annealing temperature on the long-term thermal stability of Pt/Si/Ta/Ti/4H–SiC contacts
Cheng Yue, Zhao Gao-Jie, Liu Yi-Hong, Sun Yu-Jun, Wang Tao, Chen Zhi-Zhan†
Effect of the annealing temperature on the long-term thermal stability of Pt/Si/Ta/Ti/4H–SiC contacts |
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Cheng Yue, Zhao Gao-Jie, Liu Yi-Hong, Sun Yu-Jun, Wang Tao, Chen Zhi-Zhan†
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| Cross-sectional TEM micrographs of the Si/Ta/Ti/4H–SiC contact. (a) 3R1000, (b) 3R1000-24, (c) 3R1100. |
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