Effect of the annealing temperature on the long-term thermal stability of Pt/Si/Ta/Ti/4H–SiC contacts
Cheng Yue, Zhao Gao-Jie, Liu Yi-Hong, Sun Yu-Jun, Wang Tao, Chen Zhi-Zhan†
Effect of the annealing temperature on the long-term thermal stability of Pt/Si/Ta/Ti/4H–SiC contacts |
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Cheng Yue, Zhao Gao-Jie, Liu Yi-Hong, Sun Yu-Jun, Wang Tao, Chen Zhi-Zhan†
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| Change tendencies of the specific contact resistance after the Ohmic contacts have been aged at 600 °C in air for different times. |
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