Mechanical strains in pecvd SiN x:H films for nanophotonic application
Semenova O.†a) 
, Kozelskaya A.b) , Zhi-Yong Lic) , Yu-De Yuc)
, Kozelskaya A.
Mechanical strains in pecvd SiN x:H films for nanophotonic application |
|
Semenova O.†
, Kozelskaya A. |
| Variations of (a) optical density of Si–N absorption, (b) films density, and (c) Si–N peak wave number with plasma power density. |
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