Mechanical strains in pecvd SiN x:H films for nanophotonic application
Semenova O.†a) 
, Kozelskaya A.b) , Zhi-Yong Lic) , Yu-De Yuc)
, Kozelskaya A.
Mechanical strains in pecvd SiN x:H films for nanophotonic application |
|
Semenova O.†
, Kozelskaya A. |
| IR absorption spectra of SiN x :H films grown at 160 °C on Ge prisms and power densities of 0.05 (curve a ), 0.1 (curve b ), 0.2 (curve c ), and 0.27 (curve d ) W/cm2. |
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