@article{Zi-Hao Chen(陈子豪):17301,
author = {Zi-Hao Chen(陈子豪) and Yong-Sheng Wang(王永胜) and Ning Zhang(张宁) and Bin Zhou(周兵) and Jie Gao(高洁) and Yan-Xia Wu(吴艳霞) and Yong Ma(马永) and Hong-Jun Hei(黑鸿君) and Yan-Yan Shen(申艳艳) and Zhi-Yong He(贺志勇) and Sheng-Wang Yu(于盛旺)},
title = {Effects of preparation parameters on growth and properties of β-Ga2O3 film},
publisher = {Chin. Phys. B},
year = {2023},
journal = {Chinese Physics B},
volume = {32},
number = {1},
eid = {017301},
pages = {017301},
keywords = {#i#β#/i#-Ga#sub#2#/sub#O#sub#3#/sub#;magnetron sputtering;growth parameters;optical and electrical properties},
url = {https://cpb.iphy.ac.cn/EN/abstract/article_125387.shtml},
doi = {10.1088/1674-1056/ac728c}
}