Multi-beam scanning electron microscope (MBSEM): Technological evolution, core breakthroughs, and cross-field applications
Wuyang Tan(谭吴洋), Mengni Liu(刘梦妮), Ke Pei(裴科), Chendi Yang(杨辰迪), Jiazhuan Qin(覃家转), Chao Wang(王超), Xuebing Zhao(赵雪冰), and Renchao Che(车仁超)
Multi-beam scanning electron microscope (MBSEM): Technological evolution, core breakthroughs, and cross-field applications
Wuyang Tan(谭吴洋), Mengni Liu(刘梦妮), Ke Pei(裴科), Chendi Yang(杨辰迪), Jiazhuan Qin(覃家转), Chao Wang(王超), Xuebing Zhao(赵雪冰), and Renchao Che(车仁超)
中国物理B
.
2026, (6): 60705
-060705
.
DOI: 10.1088/1674-1056/ae4c69