Low-loss, high-coherence airbridge interconnects fabricated by single-step lithography
Ji-Bang Fu(付济邦), Bo Ren(任波), Jian-Dong Ouyang(欧阳剑东), Cong Li(李璁), Ke-Cheng-Qi Zhu(朱可承琪), Yong-Gang Che(车永刚), Xiang Fu(付祥), Shi-Chuan Xue(薛诗川), Zhao-Hua Yang(杨钊华), Ming-Tang Deng(邓明堂), and Jun-Jie Wu(吴俊杰)
Low-loss, high-coherence airbridge interconnects fabricated by single-step lithography
Ji-Bang Fu(付济邦), Bo Ren(任波), Jian-Dong Ouyang(欧阳剑东), Cong Li(李璁), Ke-Cheng-Qi Zhu(朱可承琪), Yong-Gang Che(车永刚), Xiang Fu(付祥), Shi-Chuan Xue(薛诗川), Zhao-Hua Yang(杨钊华), Ming-Tang Deng(邓明堂), and Jun-Jie Wu(吴俊杰)
中国物理B
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2026, (4): 40312
-040312
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DOI: 10.1088/1674-1056/ae50e2