Effects of coil structure and electromagnetic shielding on plasma distribution and uniformity in large-area radio-frequency inductively coupled plasmas
Cheng Xin(辛程), Xiang-Yun Lyu(吕翔云), Si-Yu Xing(邢思雨), Yu-Ru Zhang(张钰如), Tao Liu(刘涛), Wei-Ping Le(乐卫平), Fei Gao(高飞), and You-Nian Wang(王友年)
Effects of coil structure and electromagnetic shielding on plasma distribution and uniformity in large-area radio-frequency inductively coupled plasmas
Cheng Xin(辛程), Xiang-Yun Lyu(吕翔云), Si-Yu Xing(邢思雨), Yu-Ru Zhang(张钰如), Tao Liu(刘涛), Wei-Ping Le(乐卫平), Fei Gao(高飞), and You-Nian Wang(王友年)
中国物理B
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2026, (2): 25201
-025201
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DOI: 10.1088/1674-1056/ae2113