Simulation of capacitively coupled Ar/O 2 discharges based on global/equivalent circuit model and an extended reaction set
Yi Wang(王怡), Wan Dong(董婉), Yi-Fan Zhang(张逸凡), Liu-Qin Song(宋柳琴), and Yuan-Hong Song(宋远红)
Simulation of capacitively coupled Ar/O 2 discharges based on global/equivalent circuit model and an extended reaction set
Yi Wang(王怡), Wan Dong(董婉), Yi-Fan Zhang(张逸凡), Liu-Qin Song(宋柳琴), and Yuan-Hong Song(宋远红)
中国物理B . 2025, (8): 85201 -085201 .  DOI: 10.1088/1674-1056/add4e5