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Influence of sputtering ambient with hydrogen gas on optoelectrical properties of Ta-doped tin oxide
Haozhen Li(李昊臻), Xingqian Chen(陈兴谦), Minqiu Du(杜敏求), Wei Chen(陈伟), and Xiaolong Du(杜小龙)
Influence of sputtering ambient with hydrogen gas on optoelectrical properties of Ta-doped tin oxide
Haozhen Li(李昊臻), Xingqian Chen(陈兴谦), Minqiu Du(杜敏求), Wei Chen(陈伟), and Xiaolong Du(杜小龙)
中国物理B . 2025, (
7
): 77303 -077303 . DOI: 10.1088/1674-1056/adc97f