Pit density reduction for AlN epilayers grown by molecular beam epitaxy using Al modulation method
Huan Liu(刘欢), Peng-Fei Shao(邵鹏飞), Song-Lin Chen(陈松林), Tao Tao(陶涛), Yu Yan(严羽), Zi-Li Xie(谢自力), Bin Liu(刘斌), Dun-Jun Chen(陈敦军), Hai Lu(陆海), Rong Zhang(张荣), and Ke Wang(王科)
Pit density reduction for AlN epilayers grown by molecular beam epitaxy using Al modulation method
Huan Liu(刘欢), Peng-Fei Shao(邵鹏飞), Song-Lin Chen(陈松林), Tao Tao(陶涛), Yu Yan(严羽), Zi-Li Xie(谢自力), Bin Liu(刘斌), Dun-Jun Chen(陈敦军), Hai Lu(陆海), Rong Zhang(张荣), and Ke Wang(王科)
中国物理B
.
2024, (10): 106801
-106801
.
DOI: 10.1088/1674-1056/ad7671