In-situ deposited anti-aging TiN capping layer for Nb superconducting quantum circuits
Hao-Ran Tao(陶浩然), Lei Du(杜磊), Liang-Liang Guo(郭亮亮), Yong Chen(陈勇), Hai-Feng Zhang(张海峰), Xiao-Yan Yang(杨小燕), Guo-Liang Xu(徐国良), Chi Zhang(张 驰), Zhi-Long Jia(贾志龙), Peng Duan(段鹏), and Guo-Ping Guo(郭国平)
In-situ deposited anti-aging TiN capping layer for Nb superconducting quantum circuits
Hao-Ran Tao(陶浩然), Lei Du(杜磊), Liang-Liang Guo(郭亮亮), Yong Chen(陈勇), Hai-Feng Zhang(张海峰), Xiao-Yan Yang(杨小燕), Guo-Liang Xu(徐国良), Chi Zhang(张 驰), Zhi-Long Jia(贾志龙), Peng Duan(段鹏), and Guo-Ping Guo(郭国平)
中国物理B
.
2024, (9): 90310
-090310
.
DOI: 10.1088/1674-1056/ad6a3c