Discharge mode and particle transport in radio frequency capacitively coupled Ar/O
2 plasma discharges
Zhuo-Yao Gao(高卓瑶), Wan Dong(董婉), Chong-Biao Tian(田崇彪), Xing-Zhao Jiang(蒋星照), Zhong-Ling Dai(戴忠玲), and Yuan-Hong Song(宋远红)
Discharge mode and particle transport in radio frequency capacitively coupled Ar/O
2 plasma discharges
Zhuo-Yao Gao(高卓瑶), Wan Dong(董婉), Chong-Biao Tian(田崇彪), Xing-Zhao Jiang(蒋星照), Zhong-Ling Dai(戴忠玲), and Yuan-Hong Song(宋远红)
中国物理B
.
2024, (9): 95203
-095203
.
DOI: 10.1088/1674-1056/ad5d65