Design of a high sensitivity and wide range angular rate sensor based on exceptional surface
Xinsheng Ding(丁鑫圣), Wenyao Liu(刘文耀), Shixian Wang(王师贤), Yu Tao(陶煜), Yanru Zhou(周彦汝), Yu Bai(白禹), Lai Liu(刘来), Enbo Xing(邢恩博), Jun Tang(唐军), and Jun Liu(刘俊)
Design of a high sensitivity and wide range angular rate sensor based on exceptional surface
Xinsheng Ding(丁鑫圣), Wenyao Liu(刘文耀), Shixian Wang(王师贤), Yu Tao(陶煜), Yanru Zhou(周彦汝), Yu Bai(白禹), Lai Liu(刘来), Enbo Xing(邢恩博), Jun Tang(唐军), and Jun Liu(刘俊)
中国物理B
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2024, (8): 84204
-084204
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DOI: 10.1088/1674-1056/ad4324