Physical mechanism of secondary-electron emission in Si wafers
Yanan Zhao(赵亚楠), Xiangzhao Meng(孟祥兆), Shuting Peng(彭淑婷), Guanghui Miao(苗光辉), Yuqiang Gao(高玉强), Bin Peng(彭斌), Wanzhao Cui(崔万照), and Zhongqiang Hu(胡忠强)
Physical mechanism of secondary-electron emission in Si wafers
Yanan Zhao(赵亚楠), Xiangzhao Meng(孟祥兆), Shuting Peng(彭淑婷), Guanghui Miao(苗光辉), Yuqiang Gao(高玉强), Bin Peng(彭斌), Wanzhao Cui(崔万照), and Zhongqiang Hu(胡忠强)
中国物理B
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2024, (4): 47901
-047901
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DOI: 10.1088/1674-1056/ad1175