Global simulation of plasma series resonance effect in radio frequency capacitively coupled Ar/O
2 plasma
Xue Bai(白雪), Hai-Wen Xu(徐海文), Chong-Biao Tian(田崇彪), Wan Dong(董婉), Yuan-Hong Song(宋远红), and You-Nian Wang(王友年)
Global simulation of plasma series resonance effect in radio frequency capacitively coupled Ar/O
2 plasma
Xue Bai(白雪), Hai-Wen Xu(徐海文), Chong-Biao Tian(田崇彪), Wan Dong(董婉), Yuan-Hong Song(宋远红), and You-Nian Wang(王友年)
中国物理B
.
2023, (12): 125203
-125203
.
DOI: 10.1088/1674-1056/ace427