Facile integration of an Al-rich Al 1-xIn xN photodetector on free-standing GaN by radio-frequency magnetron sputtering
Xinke Liu(刘新科), Zhichen Lin(林之晨), Yuheng Lin(林钰恒), Jianjin Chen(陈建金), Ping Zou(邹苹), Jie Zhou(周杰), Bo Li(李博), Longhai Shen(沈龙海), Deliang Zhu(朱德亮), Qiang Liu(刘强), Wenjie Yu(俞文杰), Xiaohua Li(黎晓华), Hong Gu(顾泓), Xinzhong Wang(王新中), and Shuangwu Huang(黄双武)
Facile integration of an Al-rich Al 1-xIn xN photodetector on free-standing GaN by radio-frequency magnetron sputtering
Xinke Liu(刘新科), Zhichen Lin(林之晨), Yuheng Lin(林钰恒), Jianjin Chen(陈建金), Ping Zou(邹苹), Jie Zhou(周杰), Bo Li(李博), Longhai Shen(沈龙海), Deliang Zhu(朱德亮), Qiang Liu(刘强), Wenjie Yu(俞文杰), Xiaohua Li(黎晓华), Hong Gu(顾泓), Xinzhong Wang(王新中), and Shuangwu Huang(黄双武)
中国物理B . 2023, (11): 117701 -117701 .  DOI: 10.1088/1674-1056/acbf25