Low-damage photolithography for magnetically doped (Bi,Sb)
2Te
3 quantum anomalous Hall thin films
Zhiting Gao(高志廷), Minghua Guo(郭明华), Zichen Lian(连梓臣), Yaoxin Li(李耀鑫), Yunhe Bai(白云鹤), Xiao Feng(冯硝), Ke He(何珂), Yayu Wang(王亚愚), Chang Liu(刘畅), and Jinsong Zhang(张金松)
Low-damage photolithography for magnetically doped (Bi,Sb)
2Te
3 quantum anomalous Hall thin films
Zhiting Gao(高志廷), Minghua Guo(郭明华), Zichen Lian(连梓臣), Yaoxin Li(李耀鑫), Yunhe Bai(白云鹤), Xiao Feng(冯硝), Ke He(何珂), Yayu Wang(王亚愚), Chang Liu(刘畅), and Jinsong Zhang(张金松)
中国物理B
.
2023, (11): 117303
-117303
.
DOI: 10.1088/1674-1056/ad0147