Optimal impurity distribution model and experimental verification of variation of lateral doping termination
Min Ren(任敏), Chang-Yu Ye(叶昶宇), Jian-Yu Zhou(周建宇), Xin Zhang(张新), Fang Zheng(郑芳), Rong-Yao Ma(马荣耀), Ze-Hong Li(李泽宏), and Bo Zhang(张波)
Optimal impurity distribution model and experimental verification of variation of lateral doping termination
Min Ren(任敏), Chang-Yu Ye(叶昶宇), Jian-Yu Zhou(周建宇), Xin Zhang(张新), Fang Zheng(郑芳), Rong-Yao Ma(马荣耀), Ze-Hong Li(李泽宏), and Bo Zhang(张波)
中国物理B
.
2023, (4): 48505
-048505
.
DOI: 10.1088/1674-1056/acbd29