Origin, characteristics, and suppression of residual nitrogen in MPCVD diamond growth reactor
Yan Teng(滕妍), Dong-Yang Liu(刘东阳), Kun Tang(汤琨), Wei-Kang Zhao(赵伟康), Zi-Ang Chen(陈子昂), Ying-Meng Huang(黄颖蒙), Jing-Jing Duan(段晶晶), Yue Bian(卞岳), Jian-Dong Ye(叶建东), Shun-Ming Zhu(朱顺明), Rong Zhang(张荣), You-Dou Zheng(郑有炓), and Shu-Lin Gu(顾书林)
Origin, characteristics, and suppression of residual nitrogen in MPCVD diamond growth reactor
Yan Teng(滕妍), Dong-Yang Liu(刘东阳), Kun Tang(汤琨), Wei-Kang Zhao(赵伟康), Zi-Ang Chen(陈子昂), Ying-Meng Huang(黄颖蒙), Jing-Jing Duan(段晶晶), Yue Bian(卞岳), Jian-Dong Ye(叶建东), Shun-Ming Zhu(朱顺明), Rong Zhang(张荣), You-Dou Zheng(郑有炓), and Shu-Lin Gu(顾书林)
中国物理B
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2022, (12): 128106
-128106
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DOI: 10.1088/1674-1056/ac7552