Fundamental study towards a better understanding of low pressure radio-frequency plasmas for industrial applications
Yong-Xin Liu(刘永新), Quan-Zhi Zhang(张权治), Kai Zhao(赵凯), Yu-Ru Zhang(张钰如), Fei Gao(高飞),Yuan-Hong Song(宋远红), and You-Nian Wang(王友年)
Fundamental study towards a better understanding of low pressure radio-frequency plasmas for industrial applications
Yong-Xin Liu(刘永新), Quan-Zhi Zhang(张权治), Kai Zhao(赵凯), Yu-Ru Zhang(张钰如), Fei Gao(高飞),Yuan-Hong Song(宋远红), and You-Nian Wang(王友年)
中国物理B
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2022, (8): 85202
-085202
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DOI: 10.1088/1674-1056/ac7551