Characterization of a nano line width reference material based on metrological scanning electron microscope
Fang Wang(王芳), Yushu Shi(施玉书), Wei Li(李伟), Xiao Deng(邓晓), Xinbin Cheng(程鑫彬), Shu Zhang(张树), and Xixi Yu(余茜茜)
Characterization of a nano line width reference material based on metrological scanning electron microscope
Fang Wang(王芳), Yushu Shi(施玉书), Wei Li(李伟), Xiao Deng(邓晓), Xinbin Cheng(程鑫彬), Shu Zhang(张树), and Xixi Yu(余茜茜)
中国物理B
.
2022, (5): 50601
-050601
.
DOI: 10.1088/1674-1056/ac3225