Theoretical study on the improvement of the doping efficiency of Al in 4H-SiC by co-doping group-IVB elements
Yuanchao Huang(黄渊超), Rong Wang(王蓉), Yixiao Qian(钱怡潇), Yiqiang Zhang(张懿强), Deren Yang(杨德仁), and Xiaodong Pi(皮孝东)
Theoretical study on the improvement of the doping efficiency of Al in 4H-SiC by co-doping group-IVB elements
Yuanchao Huang(黄渊超), Rong Wang(王蓉), Yixiao Qian(钱怡潇), Yiqiang Zhang(张懿强), Deren Yang(杨德仁), and Xiaodong Pi(皮孝东)
中国物理B
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2022, (4): 46104
-046104
.
DOI: 10.1088/1674-1056/ac20ca