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Comparative study of high temperature anti-oxidation property of sputtering deposited stoichiometric and Si-rich SiC films
Hang-Hang Wang(王行行), Wen-Qi Lu(陆文琪), Jiao Zhang(张娇), and Jun Xu(徐军)
Comparative study of high temperature anti-oxidation property of sputtering deposited stoichiometric and Si-rich SiC films
Hang-Hang Wang(王行行), Wen-Qi Lu(陆文琪), Jiao Zhang(张娇), and Jun Xu(徐军)
中国物理B . 2022, (
4
): 48103 -048103 . DOI: 10.1088/1674-1056/ac3a61