Differential nonlinear photocarrier radiometry for characterizing ultra-low energy boron implantation in silicon
Xiao-Ke Lei(雷晓轲), Bin-Cheng Li(李斌成), Qi-Ming Sun(孙启明), Jing Wang(王静), Chun-Ming Gao(高椿明), and Ya-Fei Wang(王亚非)
Differential nonlinear photocarrier radiometry for characterizing ultra-low energy boron implantation in silicon
Xiao-Ke Lei(雷晓轲), Bin-Cheng Li(李斌成), Qi-Ming Sun(孙启明), Jing Wang(王静), Chun-Ming Gao(高椿明), and Ya-Fei Wang(王亚非)
中国物理B
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2022, (3): 38102
-038102
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DOI: 10.1088/1674-1056/ac1efe