Impact of STI indium implantation on reliability of gate oxide
Xiao-Liang Chen(陈晓亮), Tian Chen(陈天), Wei-Feng Sun(孙伟锋), Zhong-Jian Qian(钱忠健), Yu-Dai Li(李玉岱), and Xing-Cheng Jin(金兴成)
Impact of STI indium implantation on reliability of gate oxide
Xiao-Liang Chen(陈晓亮), Tian Chen(陈天), Wei-Feng Sun(孙伟锋), Zhong-Jian Qian(钱忠健), Yu-Dai Li(李玉岱), and Xing-Cheng Jin(金兴成)
中国物理B
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2022, (2): 28505
-028505
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DOI: 10.1088/1674-1056/ac0e26