Three-dimensional vertical ZnO transistors with suspended top electrodes fabricated by focused ion beam technology
Chi Sun(孙驰), Linyuan Zhao(赵林媛), Tingting Hao(郝婷婷), Renrong Liang(梁仁荣), Haitao Ye(叶海涛), Junjie Li(李俊杰), and Changzhi Gu(顾长志)
Three-dimensional vertical ZnO transistors with suspended top electrodes fabricated by focused ion beam technology
Chi Sun(孙驰), Linyuan Zhao(赵林媛), Tingting Hao(郝婷婷), Renrong Liang(梁仁荣), Haitao Ye(叶海涛), Junjie Li(李俊杰), and Changzhi Gu(顾长志)
中国物理B
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2022, (1): 16801
-016801
.
DOI: 10.1088/1674-1056/ac34fe