Discharge characteristic of very high frequency capacitively coupled argon plasma
Gui-Qin Yin(殷桂琴), Jing-Jing Wang(王兢婧), Shan-Shan Gao(高闪闪), Yong-Bo Jiang(姜永博), and Qiang-Hua Yuan(袁强华)
Discharge characteristic of very high frequency capacitively coupled argon plasma
Gui-Qin Yin(殷桂琴), Jing-Jing Wang(王兢婧), Shan-Shan Gao(高闪闪), Yong-Bo Jiang(姜永博), and Qiang-Hua Yuan(袁强华)
中国物理B
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2021, (9): 95204
-095204
.
DOI: 10.1088/1674-1056/abf104