Time-resolved radial uniformity of pulse-modulated inductively coupled O
2/Ar plasmas
Wei Liu(刘巍), Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), You-Nian Wang(王友年), and Yong-Tao Zhao(赵永涛)
Time-resolved radial uniformity of pulse-modulated inductively coupled O
2/Ar plasmas
Wei Liu(刘巍), Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), You-Nian Wang(王友年), and Yong-Tao Zhao(赵永涛)
中国物理B
.
2021, (6): 65202
-065202
.
DOI: 10.1088/1674-1056/abe3f5